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History Of Development

The 19th century saw increasing research with evacuated tubes, such as the Geissler and Crookes tubes. Scientists who experimented with such tubes included Eugen Goldstein, Nikola Tesla, Johann Wilhelm Hittorf, Thomas Edison, and many others. These tubes were mostly for specialized scientific applications, or were novelties, with the exception of the light bulb. The groundwork laid by these scientists and inventors, however, was critical to the development of vacuum tube technology.
Though the thermionic emission effect was originally reported in 1873 by Frederick Guthrie, it is Thomas Edison's 1883 investigation of the "Edison Effect" that is more often mentioned. Edison promptly patented what he found, but he did not understand the process.

Information From Wikipedia