Field emitter vacuum tubes

In the early years of the 21st century there has been renewed interest in vacuum tubes, this time in the form of integrated circuits. The most common design uses a cold cathode field emitter, with electrons emitted from a number of sharp nano-scale tips formed on the surface of a metal cathode.
Their advantages include greatly enhanced robustness combined with the ability to provide high power outputs at low power consumptions. Operating on the same principles as traditional tubes, prototype device cathodes have been constructed with emitter tips formed using nanotubes, and by etching electrodes as hinged flaps (similar to the technology used to create the microscopic mirrors used in Digital Light Processing) that are stood upright by a magnetic field.
Such integrated microtubes may find application in microwave devices including mobile phones, for Bluetooth and Wi-Fi transmission, in radar and for satellite communication. Presently they are being studied for possible application to flat-panel display construction.

Information from Wikipedia.